Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2006-08-29
2006-08-29
Pham, Hoa Q. (Department: 2877)
Optics: measuring and testing
By polarized light examination
Of surface reflection
Reexamination Certificate
active
07099006
ABSTRACT:
An electromagnetic beam chromatic shifting and directing means for use in reflectively directing a spectroscopic beam of electromagnetic radiation while de-emphasizing visual wavelength intensity and simultaneously emphasizing both IR and UV wavelength intensities, applied in ellipsometer or polarimeter and the like systems.
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Papers, by Azzam and Azzam et al. are also identified as concerning alternative approaches to the goal of the present invention and are titled: “Multichannel Polarization State Detectors For Time-Resolved Ellipsometry”, Thin Solid Film, 234 (1993); and.
“Spectrophotopolarimeter Based On Multiple Reflections In A Coated Dielectric Slab”, Thin Solid Films 313 (1998); and.
“General Analysis And Optimization Of The Four-Detector Photopolarimeter”, J. Opt. Soc. Am., A, vol. 5, No. 5 (May 1988); and.
“Accurate Calibration Of Four-Detector Photopolarimeter With Imperfect Polarization Optical Elements”, J. Opt. Soc. Am., vol. 6, No. 10, (Oct. 1989); and.
“Review paper by Collins, titled Automatic Rotating Element Ellipsometers: Calibration, Operation and Real-Time Applications”, Rev. Sci. Instrum., 61(8) (1990), is identified for general information.
Goeden Christopher A.
Hale Jeffrey S.
Johs Blaine D.
Pfeiffer Galen L.
J.A. Woollam Co. INC
Pham Hoa Q.
Welch James D.
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