Ellipsometer measurement apparatus

Details Ellipsometer measurement apparatus Ellipsometer measurement apparatus

2006-08-08

2006-08-08

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By polarized light examination

Of surface reflection

Reexamination Certificate

active

07088448

ABSTRACT:
An ellipsometer measurement apparatus for determining the thickness of a film applied on a substrate, is described. The apparatus includes a light source emitting an incoming beam, a transmitting optical system conveying the polarized incoming beam to an incidence point on the substrate, and a receiving optical system that has an analyzer and conveys the reflected beam formed at the incidence point to a photodetector device, the polarization direction of the incoming beam and of the analyzer being modified in time relative to one another, and the intensity changes produced thereby being evaluated by way of an evaluation device in order to determine the film thickness. Easy handling and accurate measurement of the film thickness, even on difficult-to-access measured objects having differing curvatures, are achieved by the fact that an angle measurement device is provided with which the angle of the reflected beam relative to a tangential plane of the substrate at the incidence point can be sensed, and that the film thickness can be determined by way of the evaluation device as a function of the angle that is sensed.

REFERENCES:
patent: 3985447 (1976-10-01), Aspnes
patent: 4647207 (1987-03-01), Bjork et al.
patent: 4872758 (1989-10-01), Miyazaki et al.
patent: 4957368 (1990-09-01), Smith
patent: 4999014 (1991-03-01), Gold et al.
patent: 5333052 (1994-07-01), Finarov
patent: 5757494 (1998-05-01), Herzinger et al.
patent: 5764365 (1998-06-01), Finarov
patent: 5838432 (1998-11-01), Tokuhashi et al.
patent: 0 397 388 (1990-11-01), None
patent: 05280937 (1993-10-01), None
patent: WO 96 29583 (1996-09-01), None
patent: WO 97 35177 (1997-09-01), None
“Automated Multiple Angle of Incidence Ellipsometer System,” Feb. 1, 1990, IBM Technical Disclosure Bulletin, vol. 32, Issue No. 9a, pp. 417-424.
BoschTechnische Berichte, vol. 4 (1974), No. 7, pp. 315-320*.

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