Ellipsometer

Details Ellipsometer Ellipsometer

1997-11-25

1999-10-05

Font, Frank G.

Optics: measuring and testing

By polarized light examination

Of surface reflection

356364, 356365, 356376, G01J 400, G01B 1124

Patent

active

059633263

ABSTRACT:
The present invention discloses an ellipsometer using incident light having a wide beam diameter, comprising: a collimator for making the light parallel; a polarizer for transforming the light into a suitable linearly polarized state and radiating onto the sample; a beam expander for expanding the light to the size required for a single measurement; an objective lens composed of an afocal lens system for capturing the light reflected from the sample; an analyzer for converting the reflected light to suitable linearly polarized light; an imaging lens composed of an afocal lens system for forming an image of the sample on a image sensor; and, a image sensor; whereby, measurement of the polarized light can be performed at high speed and high resolution.

REFERENCES:
patent: 4077720 (1978-03-01), Kasai
patent: 4516855 (1985-05-01), Korth
patent: 5166752 (1992-11-01), Spanier et al.
patent: 5648871 (1997-07-01), Okuyama et al.
patent: 5737084 (1998-04-01), Ishihara

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