Optics: measuring and testing – By polarized light examination – Of surface reflection
Patent
1995-05-15
1997-08-12
Pham, Hoa Q.
Optics: measuring and testing
By polarized light examination
Of surface reflection
250225, G01N 2121
Patent
active
056571267
ABSTRACT:
In an ellipsometer, a phase-modulated, polarized light beam is applied to a sample, electrical signals are obtained representing the orthogonal planes of polarization of the light after it has interacted with the sample and the constants of the sample are calculated from the two resulting electrical signals. The phase modulation is sufficiently small so that the calibration errors are negligible. For this purpose, the phase modulator, phase modulates the light within a range of no more than ten degrees peak to peak. The two electrical signals are expanded by Fourier analysis and the coefficients thereof utilized to calculate psi and delta.
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Ducharme Stephen Paul
El Hajj Hassanayn Machlab
Johs Blaine D.
Woollam John A.
Carney Vincent L.
Pham Hoa Q.
The Board of Regents of the University of Nebraska
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