Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Patent
1995-10-30
1998-08-04
Laballe, Clayton E.
Electrical generator or motor structure
Non-dynamoelectric
Charge accumulating
H02N 200, H02N 202, H02N 206
Patent
active
057898430
DESCRIPTION:
BRIEF SUMMARY
TECHNICAL FIELD
This invention relates to an electrostatically levitated conveyance apparatus which uses electrostatic attraction force, as well as an electrode of the apparatus for the purpose of electrostatic levitation.
BACKGROUND ART
An example of the prior art in this field has been disclosed in the specification of Japanese Patent Application Laid-Open No. 5-22960.
FIGS. 1(a) through 1(c) illustrate this example of the prior art, which is a guide support mechanism of an electrostatically levitated linear motor.
As shown in FIGS. 1(a) through 1(c), a plurality of drive electrodes 102 for generating a driving force and a plurality of levitating electrodes 103 for non-contact support of a movable element 104 are formed on the surface of a stator 101. Respective ones of driving electrodes 105 and levitating electrodes 106 are formed on the surface of the movable element 104, which opposes the stator 101. By applying a voltage across the levitating electrodes 106 of the movable element 104 and the levitating electrodes 103 of the stator 101, the movable element 104 is levitated without contact. The movable element 104 is moved in the levitated state by applying a voltage across the drive electrodes 105 of the movable element 104 and the drive electrodes 102 of the stator 101.
More specifically, the drive electrodes 102 have the form of a plurality of comb teeth arrayed at a first prescribed pitch in a direction perpendicular to the traveling direction A-A' of the movable element 104, and the teeth are connected by a lead wire 102b from a feeder terminal 102a so as to attain the same potential. The levitating electrodes 103 are four somewhat elongated band-shaped bodies extending along the traveling direction A-A' outside the drive electrodes 102 and are provided with DC voltage from respective feeder terminals 103a. The drive electrodes 105 have the form of a plurality of comb teeth arrayed at a second prescribed pitch in a direction perpendicular to the traveling direction A-A' of the movable element 104, and the teeth are connected by a lead wire 105b from a feeder terminal 105a so as to attain the same potential. The levitating electrodes 106 are four rectangular bodies placed at the four corners of the movable electrode 104 along the traveling direction A-A' thereof outside the drive electrodes 105 and are connected by a lead wire 106b so as to attain the same potential. A DC voltage is applied to the levitating electrodes 106 from a feeder terminal 106a.
However, a problem with this prior-art guide support mechanism of an electrostatically levitated linear motor is that the levitating electrodes and drive electrodes are separate from each other, as a result of which the area of the electrode plates cannot be utilized effectively. Since the electrostatic force is directly proportional to the electrode area, a large levitating force cannot be obtained for levitation and there is a decline in the levitational rigidity as well.
In addition, the lead wires of the drive electrodes are interposed between the levitating electrodes and the drive electrodes and are easily destroyed by electrical discharge.
Furthermore, since it is necessary to form the electrodes on the body to be conveyed, the body cannot be conveyed as is.
An extremely clean working environment is presently required in various fields, such as in the semiconductor and precision equipment industries. To raise the degree of cleanliness, the elimination of dust is demanded as well as the development of non-contact conveyance mechanisms, which do not rely upon mechanical contact, in order to prevent the generation of dust.
The inventors have conducted extensive research with regard to electrostatic levitation by controlling DC voltage in order to develop a mechanism in which plate-shaped objects such as silicon wafers are handled and conveyed without contact.
FIG. 2 illustrates an example of the structure of an electrostatic levitation apparatus for levitating a plate-shaped object.
As shown in FIG. 2, a voltage applied to an electrode 1 on a
REFERENCES:
patent: 3961000 (1976-06-01), Ferriss et al.
patent: 4943750 (1990-07-01), Howe et al.
Higuchi Toshiro
Jin Ju
Kanemoto Manabu
Kanagawa Academy of Science and Technology
LaBalle Clayton E.
Mitsubishi Materials Corporation
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