Electrostatic RF MEMS switches

Details Electrostatic RF MEMS switches Electrostatic RF MEMS switches

2006-10-17

2006-10-17

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S330000

Reexamination Certificate

active

07122942

ABSTRACT:
A micro switch having a dielectric layer having a movement region formed on a substrate, a conductive layer formed on a predetermined portion of the movement region, a dielectric film formed on the conductive layer, first and second electric conductors formed a predetermined distance above the dielectric film, one or two lower electrodes formed on the movement region, and one or two upper electrodes formed a predetermined distance above the two lower electrodes, the one or two upper electrodes moving the conductive layer and the dielectric film upwards when an electrostatic force occurs between the upper and lower electrodes, and capacitively coupled with the first and second electric conductors to allow a current to flow between the first and second electric conductors. Such a micro switch has a high on/off ratio and isolation degree and a simple structure, and can be fabricated in a very easy process.

REFERENCES:
patent: 5772322 (1998-06-01), Burns et al.
patent: 6143997 (2000-11-01), Feng et al.
patent: 6271052 (2001-08-01), Miller et al.
patent: 6407482 (2002-06-01), Sakata et al.
patent: 6426687 (2002-07-01), Osborn
patent: 6529093 (2003-03-01), Ma
patent: 6602427 (2003-08-01), Tu
patent: 6713314 (2004-03-01), Wong et al.
patent: 2002/0008444 (2002-01-01), Sakata et al.
patent: 2002/0171121 (2002-11-01), Ozgur
patent: 2003/0006868 (2003-01-01), Aigner et al.
patent: 2004/0157367 (2004-08-01), Wong et al.
patent: 2004/0183402 (2004-09-01), Mizuyama et al.
patent: 2004/0211654 (2004-10-01), Park
patent: 2005/0046541 (2005-03-01), Fouillet
patent: 2005/0225921 (2005-10-01), Nakatani et al.
patent: 2006/0017533 (2006-01-01), Jahnes et al.
patent: 0 923 099 (1999-06-01), None
patent: WO 94/18688 (1994-08-01), None
patent: WO 01/57901 (2001-08-01), None

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