Electrostatic motor with clearance maintaining structure

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating

Reexamination Certificate

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Reexamination Certificate

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07372186

ABSTRACT:
An electrostatic motor provided with a stationary member including a first major surface and a first back surface opposite to the first major surface; and a movable member including a second major surface and a second back surface opposite to the second major surface, the movable member being arranged to be movable relative to the stationary member in a condition where the second major surface is opposed to the first major surface of the stationary member. The electrostatic motor includes a protuberance provided to project from at least one of the first major surface of the stationary member and the second major surface of the movable member, for ensuring a predetermined clearance between the first major surface and the second major surface. The electrostatic motor may include a plurality of stationary members and a plurality of movable members, assembled with each other in a manner as to alternately arrange the stationary members and the movable members. In this arrangement, the electrostatic motor may further include a back-side protuberance provided to project from at least one of the first back surface of each of the stationary members and the second back surface of each of the movable members, for ensuring a predetermined clearance between the first back surface and the second back surface.

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Yamamoto A et al., “High Precision Electrostatic Actuator with Novel Electrode Design”, Micro Electro Mechanical Systems, Jan. 25, 1998, pp. 408-413.
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