Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Patent
1989-07-03
1990-07-24
Budd, Mark O.
Electrical generator or motor structure
Non-dynamoelectric
Charge accumulating
310 42, 310 905, H01L 4108
Patent
active
049437500
ABSTRACT:
An electrostatically driven microactuator is micromachined in a monolithic process. Sacrificial layers are placed between a moving element and stator structural layers. Removal of the sacrificial layers leaves a free standing moving element and micron wide air gaps within a stator. An electric field of about 100 Mv/m and higher is supported across the micron wide gap without breakdown and enables high energy torque densities to be produced between the stator and the moving element. One electrostatic drive scheme involves a series of stator electrodes attached to the stator and a series of electrodes attached to the moving element charged in sequence to attract each other in a direction of movement and to oppose each other in a direction normal to movement. A bearing is aligned with the moving element with the stator during the layering of a sacrificial layer over an edge of the moving element structural layer. The bearing and stator laterally stabilize the moving element. Vertical stability is through aerodynamic shaping of the moving element, electronic circuits, or bushings. Applications of the microactuator include a linearly sliding shutter, an optical modulator, a gyroscope and an air pump.
REFERENCES:
patent: 4789803 (1988-12-01), Jacobsen et al.
patent: 4814657 (1989-03-01), Yano et al.
Howe Roger T.
Lang Jeffrey H.
Schlecht Martin F.
Schmidt Martin A.
Senturia Stephen D.
Budd Mark O.
Massachusetts Institute of Technology
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