Electrostatic micromotor

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating

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Details

310 40MM, 310268, 310308, H02N 100

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051912511

ABSTRACT:
The micromotor comprises a rotor rotatably mounted on a stator having copolanar electrodes for setting up an electric field between the stator and the rotor. To increase the useful torque that can be supplied by the motor, the rotor includes a peripheral ring disposed opposite the electrodes and which is connected to a hub by arms that enable the ring easily to tilt in response to the electric field set up by the electrodes.

REFERENCES:
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patent: 3984709 (1976-10-01), Kuwako
patent: 4370582 (1983-01-01), Addicott
patent: 4394597 (1983-07-01), Mas
patent: 4740410 (1988-04-01), Muller et al.
patent: 4754185 (1988-06-01), Gabriel
patent: 4943750 (1990-07-01), Howe
patent: 5013954 (1991-05-01), Shibaike
patent: 5023830 (1991-07-01), Mas
Report of Lecture entitled "IC-Processed Electrostatic Micromotors", by L. S. Fan, et al., IEEE Integrated Electrical Devices Mtg., San Francisco, Calif., Dec. 1988.
Report of Lecture entitled "IC-Processed Micromotors: Design, Techn. & Testing", by Y. C. Tai, et al., IEEE Micro-Electro-Mechanical Systems, Salt Lake City, Utah, Feb. 1989.
Patent Abstracts of Japan, vol. 12, No. 335 of Sep. 1988.
Article entitled "Harmonic Electrostatic Motors", by W. Trimmer, et al., pp. 17-24, Sensors and Actuators, vol. 12, No. 335, Nov. 15, 1989.
Article entitled "Laterally Driven Polysilicon Resonant Microstructures", by W. C. Tang, et al., pp. 25-32, Sensors & Actuators, vol. 12, No. 335, Nov. 14, 1989.
International Search Report.

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