Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Patent
1998-08-17
1999-12-07
Ramirez, Nestor
Electrical generator or motor structure
Non-dynamoelectric
Charge accumulating
3612833, H02N 100
Patent
active
059989068
ABSTRACT:
An electrostatic microactuator comprising a substrate and at least one comb drive assembly having first and second comb drive members. Each of the first and second comb drive members is provided with comb drive fingers. The first comb drive member is mounted on the substrate. The at least one comb drive assembly is disposed between the first and second spaced-apart, beam-like spring members. The second comb drive member overlies the substrate. Each of the first and second beam-like members have a first end portion secured to the substrate and a second end portion secured to the second comb drive member for suspending the second comb drive member over the substrate. The second comb drive member is movable between a first position in which the comb drive fingers of the first and second comb drive members are spaced apart and a second position in which the comb drive fingers of the first and second comb drive members are interdigitated.
REFERENCES:
patent: 4239330 (1980-12-01), Ashkin et al.
patent: 4265513 (1981-05-01), Matsushita et al.
patent: 4304460 (1981-12-01), Tanaka et al.
patent: 4322126 (1982-03-01), Minowa et al.
patent: 4498730 (1985-02-01), Tanaka et al.
patent: 4626066 (1986-12-01), Levinson et al.
patent: 4674319 (1987-06-01), Muller et al.
patent: 4740410 (1988-04-01), Muller et al.
patent: 4805456 (1989-02-01), Howe et al.
patent: 4896937 (1990-01-01), Kraetsch et al.
patent: 4943750 (1990-07-01), Howe et al.
patent: 5000532 (1991-03-01), Kraetsch et al.
patent: 5024500 (1991-06-01), Stanley et al.
patent: 5025346 (1991-06-01), Tang et al.
patent: 5043043 (1991-08-01), Howe et al.
patent: 5208880 (1993-05-01), Riza et al.
patent: 5260928 (1993-11-01), Lee et al.
patent: 5327416 (1994-07-01), Lee et al.
patent: 5446811 (1995-08-01), Field et al.
patent: 5450751 (1995-09-01), Putty et al.
patent: 5452283 (1995-09-01), Lee et al.
patent: 5493440 (1996-02-01), Souda et al.
patent: 5532884 (1996-07-01), Lee et al.
patent: 5563466 (1996-10-01), Rennex et al.
patent: 5646928 (1997-07-01), Wu et al.
patent: 5647030 (1997-07-01), Jorgenson et al.
patent: 5753911 (1998-05-01), Yasuda et al.
patent: 5760998 (1998-06-01), Berberich et al.
Field, L.A., et al., "Micromachined 1X2 Optical Fiber Switch", The 8th International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Stockholm, Sweden, Jun. 25-29, 1995, pp. 344-347.
Hirano, Toshiki, et al, "Invar MEMS Milliactuator for Hard Disk Drive Applications", IEEE, Jan. 1998, pp. 378-382.
Horsley, D. A., et al., "Angular Micropositioner for Disk Drives", IEEE, Jan. 1997, pp. 454-459.
Jaecklin, V.P., et al., "Optical Microshutters and Torsional Micromirrors for Light Modulator Arrays", Proceedings IEEE Micro Electrical Mechanical Systems, Fort Lauderdale, Florida, Feb. 7-10, 1993, pp. 124-127.
Klassen, E. H., et al., "Silicon Fusion Bonding and Deep Reactive Ion Etching; A New Technology for Microstructures", The 8th International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Stockholm, Sweden, Jun. 25-29, 1995, pp. 556-559.
Legtenberg, Rob, et al., "Comb-drive actuators for large displacements", J. Micromech. Microeng. 6 (1996), pp. 320-329. (month unknown).
Mohr, J., et al., "Micro Optical Switching by Electrostatic Linear Actuators with Large Displacements", The 7th International Conference on Solid-State Sensors and Actuators, Yokohama, Japan, 1993, pp. 120-123. (month unknown).
Obermeier, E., "Design and Fabrication of an Electrostatically Driven Micro-Shutter", The 7th International Conference on Solid-State Sensors and Actuators, Yokohama, Japan, 1993, pp. 132-135. (month unknown).
Tang, William C., "Laterally Driven Polysilicon Resonant Microstructures", Sensors Actuators 20, 1989, pp. 25-31 (IEEE reprint pp. 53-59), (month unknown).
Wenk. B., et al., "Thick polysilicon based surface micromachined capacitive accelerometer with force feedback operation", SPIE vol. 2642, Oct. 1995, pp. 84-94.
Yasseen, A.A., et al.; "A Rotary Electrostatic Micromotor 1x8 Optical Switch", IEEE, 1998, pp. 116-120, (month unknown).
Drake Joseph D.
Grade John D.
Jerman John H.
Jones Judson H.
Ramirez Nestor
Seagate Technology Inc.
LandOfFree
Electrostatic microactuator and method for use thereof does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Electrostatic microactuator and method for use thereof, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electrostatic microactuator and method for use thereof will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-827589