Electrostatic micro-actuator

Details Electrostatic micro-actuator Electrostatic micro-actuator

1994-05-31

1995-12-19

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

H02N 100

Patent

active

054770971

ABSTRACT:
This invention provides an electrostatic micro-actuator whose movable element can keep stable motion even at a low speed by sealing a high viscosity fluid having a high dielectric constant between the movable element and fixed electrodes and by shaping the movable element so as to be stable in the fluid.
The electrostatic micro-actuator according to the present invention employs a fundamental construction wherein the high viscosity fluid is sealed between the movable element and the fixed electrodes, and the movable element is shaped so as to be stable in the fluid, so that the movable element keeps stable motion even at a low speed. When combined with one another in parallel and in series, such electrostatic micro-actuators can easily constitute a macro-system useful for various fields of applications.

REFERENCES:
patent: 5001381 (1991-03-01), Watanabe
patent: 5239222 (1993-08-01), Higuchi et al.
patent: 5367429 (1994-11-01), Tsuchitani et al.

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