Electrostatic levitation control system for micromechanical devi

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating

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310 90, 310 40MM, H02N 100

Patent

active

050159062

ABSTRACT:
A mass to be levitated is provided with an electrically conductive surface that is acted upon by an oscillating electrical force field generated by a plurality of charged conductive plates. The levitated mass is kept in static equilibrium in the electric field by driving the resonant circuit with an applied time varying voltage that has a frequency greater than the natural frequency of the resonant circuit. Motion of the mass is accomplished by providing actuator elements that are selectively charged to attract the mass in a given direction. Alternatively, the mass may be moved by employing a plurality of levitation control circuits that are sequentially energized.

REFERENCES:
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patent: 4740410 (1988-04-01), Muller et al.
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patent: 4780331 (1988-10-01), Cobbs, Jr. et al.
Robert Gannon, "Micromachine Magic", Popular Science, Mar. 1989, pp. 88-92.

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