Electrostatic lens assembly

Details Electrostatic lens assembly Electrostatic lens assembly

2011-01-18

2011-01-18

Vanore, David A (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S3960ML

Reexamination Certificate

active

07872239

ABSTRACT:
A lens assembly having an electrostatic lens component for a charged particle beam system is provided. The assembly includes: a first electrode having a conically shaped portion, a second electrode having a conically shaped portion, and a first insulator having a conically shaped portion, wherein the first insulator comprises two extending portions towards each of its ends, and wherein the two extending portions are formed to generate a gap between the insulator and each of the adjacent electrodes.

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Extended European Search Report, European Patent Application No. 07014813.5, Applicant: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH, Jan. 14, 2008.

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