Electrostatic lens and method for producing the same

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens

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250398, H01J 3712

Patent

active

054442567

ABSTRACT:
An electrostatic lens produces a smooth potential distribution along the center axis and is reduced in lens size and in total shape. A metal layer 13 is deposited at a certain position on an inner surface of insulating cylinder 11, and a high-resistance layer 12 is deposited on a portion except for the metal layer 13 on the inner surface of cylinder 11. A negative potential is applied from an external power source 19 to the metal layer 13, and the high-resistance layer 12 is earthed.

REFERENCES:
patent: 5293045 (1994-03-01), Miyoshi et al.

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