Electrostatic lens

Details Electrostatic lens Electrostatic lens

1992-12-10

1994-03-08

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250398, H01J 3712

Patent

active

052930459

ABSTRACT:
An electrostatic lens having at least three electrodes and an insulating holder for holding the electrodes, the inner wall of the holder being coated with a silicone carbide film. The silicone carbide film may be formed by means of a vapor deposition method. The energy of an electron beam is set to 1.5 keV or lower. The silicone carbide film may be added with an additive for controlling the electric conductivity of the silicone carbide film. The additive may be nitrogen.

REFERENCES:
patent: 4710632 (1987-12-01), Ishitani et al.
patent: 4835399 (1989-05-01), Hosaka et al.
patent: 5159170 (1992-10-01), Levin
M. Szilagyi and L. Szep, "Optimum design of electrostatic lenses", J. Vac. Sci. Technol., B6(3), May/Jun. 1988, pp. 953-957.

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