Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent
1998-12-10
2000-09-19
Sherry, Michael J.
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
279128, H01T 2300
Patent
active
061221597
ABSTRACT:
An electrostatic holding apparatus in which a voltage is applied to an conductive electrode covered with an insulating dielectric layer, in order to cause the insulating dielectric layer to electrostatically attract an object. The insulating dielectric layer is substantially formed of a sintered body produced by addition of 2.5-5 wt. % titania (TiO.sub.2) and 5 wt. % or less titanium nitride (TiN) powder to powder of a high resistivity ceramic having a volume resistivity of 1.times.10.sup.14 .OMEGA..multidot.cm or higher at 25.degree. C., followed by kneading, forming, and sintering. The sintered body has a volume resistivity of 1.times.10.sup.8 -8.times.10.sup.13 .OMEGA..multidot.cm at 25.degree. C. The volume resistivity of the insulating dielectric layer is decreased so as to increase an electrostatic attraction force, and an object can be removed at the time of stopping application of voltage. Further, the electrostatic holding apparatus does not generate impurities that would otherwise contaminate semiconductor devices. In addition, neither fine cracks nor pores remain, so that the electrostatic holding apparatus excellent in terms of withstand voltage.
REFERENCES:
patent: 5382469 (1995-01-01), Kubota et al.
patent: 5792562 (1998-08-01), Collins et al.
patent: 5909354 (1999-06-01), Harada et al.
patent: 5985813 (1999-09-01), Aida et al.
Arai Ken-ichi
Kubota Yoshihiro
Sherry Michael J.
Shin Etsu-Chemical Co., Ltd.
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