Electrostatic gripping device

Details Electrostatic gripping device Electrostatic gripping device

2006-07-11

2006-07-11

Trinh, Minh (Department: 3729)

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

C361S758000, C361S235000, C361S145000, C029S744000, C029S825000, C279S128000, C269S008000

Reexamination Certificate

active

07075772

ABSTRACT:
An electrostatic gripper for moving wafers includes bipolar electrodes with an insulating layer of zirconium oxide, which are positioned on a circuit board. The gripper is produced by a pressing process and can be operated with a DC voltage of less than 900 V. As a result, heating of the wafer is almost completely prevented even under a vacuum.

REFERENCES:
patent: 4822091 (1989-04-01), Vermeer et al.
patent: 5103367 (1992-04-01), Horwitz et al.
patent: 5880924 (1999-03-01), Kumar et al.
patent: 6075375 (2000-06-01), Burkhart et al.
patent: 6272002 (2001-08-01), Mogi et al.
patent: 6557248 (2003-05-01), Shamouilian et al.
patent: 6602813 (2003-08-01), Shinji et al.
patent: 6678143 (2004-01-01), Masuda et al.
patent: 2004/0060172 (2004-04-01), Heiland

Affiliated with

Also associated with

Rating

Electrostatic gripping device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electrostatic gripping device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electrostatic gripping device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3611093