Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate
2007-11-06
2007-11-06
Picardat, Kevin M. (Department: 2822)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Physical stress responsive
C438S050000
Reexamination Certificate
active
11316282
ABSTRACT:
A valve structure comprises an elastomeric block formed with first and second microfabricated recesses separated by a membrane portion of the elastomeric block. The valve is actuated by positioning a compliant electrode on a first side of the first recess proximate to and in physical communication with the membrane. Where the valve is to be electrostatically actuated, a second electrode is positioned on a second side of the first recess opposite the first side. Application of a potential difference across the electrodes causes the compliant electrode and the membrane to be attracted into the flow channel. Where the valve is to be electrostrictively actuated, a second electrode is positioned on the same side of the recess as the compliant electrode. Application of a potential difference across the electrodes causes the electrodes to be attracted such that elastomer membrane portion material between them is compressed and bows into the flow channel. Either of the electrostrictively or the electrostatically-actuated valve structures may include an electrically-conducting fluid in the second recess to serve as the compliant electrode.
REFERENCES:
patent: 3570515 (1971-03-01), Kinner
patent: 3747628 (1973-07-01), Holster et al.
patent: 4046159 (1977-09-01), Pegourie
patent: 4119368 (1978-10-01), Yamakazi
patent: 4153855 (1979-05-01), Feingold
patent: 4245673 (1981-01-01), Bouteille et al.
patent: 4373527 (1983-02-01), Fischell
patent: 4434704 (1984-03-01), Surjaatmadja
patent: 4575681 (1986-03-01), Grosso et al.
patent: 4662710 (1987-05-01), ten Berge
patent: 4898582 (1990-02-01), Faste
patent: 4992312 (1991-02-01), Frisch
patent: 5085562 (1992-02-01), Van Lintel
patent: 5088515 (1992-02-01), Kamen
patent: 5096388 (1992-03-01), Weinberg
patent: 5126115 (1992-06-01), Fujita et al.
patent: 5164558 (1992-11-01), Huff et al.
patent: 5171132 (1992-12-01), Miyazaki
patent: 5224843 (1993-07-01), Van Lintel
patent: 5259737 (1993-11-01), Kamisuki et al.
patent: 5265327 (1993-11-01), Faris et al.
patent: 5290240 (1994-03-01), Horres, Jr.
patent: 5336062 (1994-08-01), Richter
patent: 5346372 (1994-09-01), Naruse et al.
patent: 5375979 (1994-12-01), Trah
patent: 5376252 (1994-12-01), Ekstrom
patent: 5400741 (1995-03-01), DeTitta et al.
patent: 5423287 (1995-06-01), Usami et al.
patent: 5529465 (1996-06-01), Zengerle et al.
patent: 5574893 (1996-11-01), Southgate et al.
patent: 5593130 (1997-01-01), Hansson et al.
patent: 5642015 (1997-06-01), Whitehead et al.
patent: 5646072 (1997-07-01), Maudie et al.
patent: 5659171 (1997-08-01), Young et al.
patent: 5660370 (1997-08-01), Webster
patent: 5665070 (1997-09-01), McPhee
patent: 5681024 (1997-10-01), Lisec et al.
patent: 5705018 (1998-01-01), Hartley
patent: 5759014 (1998-06-01), Van Lintel
patent: 5775371 (1998-07-01), Pan et al.
patent: 5788468 (1998-08-01), Dewa et al.
patent: 5836750 (1998-11-01), Cabuz
patent: 5842787 (1998-12-01), Kopf-Sill et al.
patent: 5854684 (1998-12-01), Stabile et al.
patent: 5875817 (1999-03-01), Carter
patent: 5876187 (1999-03-01), Forster et al.
patent: 5932799 (1999-08-01), Moles
patent: 5942443 (1999-08-01), Parce et al.
patent: 5997961 (1999-12-01), Feng et al.
patent: 6007309 (1999-12-01), Hartley
patent: 6043080 (2000-03-01), Lipshutz et al.
patent: 6123769 (2000-09-01), Sanjoh
patent: 6155282 (2000-12-01), Zachary et al.
patent: 6174365 (2001-01-01), Sanjoh
patent: 6246330 (2001-06-01), Nielsen
patent: 6296673 (2001-10-01), Santarsiero et al.
patent: 6329209 (2001-12-01), Wagner et al.
patent: 6345502 (2002-02-01), Tai et al.
patent: 6358387 (2002-03-01), Kopf-Sill et al.
patent: 6375871 (2002-04-01), Bentsen et al.
patent: 6376971 (2002-04-01), Pelrine et al.
patent: 6408878 (2002-06-01), Unger et al.
patent: 6409832 (2002-06-01), Weigl et al.
patent: 6488832 (2002-12-01), Heller
patent: 6488872 (2002-12-01), Beebe et al.
patent: 6520936 (2003-02-01), Mann
patent: 6541071 (2003-04-01), Bookbinder et al.
patent: 6667124 (2003-12-01), Suenaga et al.
patent: 6689473 (2004-02-01), Guire et al.
patent: 6713327 (2004-03-01), Leedy
patent: 6716378 (2004-04-01), Yang et al.
patent: 6765279 (2004-07-01), Leedy
patent: 6767706 (2004-07-01), Quake et al.
patent: 6829753 (2004-12-01), Lee et al.
patent: 6847153 (2005-01-01), Balizer
patent: 6866785 (2005-03-01), Zare et al.
patent: 6884346 (2005-04-01), Zare et al.
patent: 7056758 (2006-06-01), Segal et al.
patent: 2001/0027745 (2001-10-01), Weigl et al.
patent: 2002/0014673 (2002-02-01), Leedy
patent: 2002/0037499 (2002-03-01), Quake et al.
patent: 2002/0045297 (2002-04-01), Leedy
patent: 2002/0108096 (2002-08-01), Lee et al.
patent: 2003/0019833 (2003-01-01), Unger et al.
patent: 2003/0080442 (2003-05-01), Unger
patent: 2003/0134129 (2003-07-01), Lammertink et al.
patent: 2004/0072278 (2004-04-01), Chou et al.
patent: 2004/0248167 (2004-12-01), Quake et al.
patent: 2005/0065735 (2005-03-01), Lee et al.
patent: 2005/0197652 (2005-09-01), Nat
patent: 2005/0221529 (2005-10-01), Bang et al.
patent: 0 592 094 (1994-04-01), None
patent: 0 703 364 (1996-03-01), None
patent: 0 706 004 (1996-04-01), None
patent: 0 779 436 (1997-06-01), None
patent: 0 829 360 (1998-03-01), None
patent: 0 845 603 (1998-06-01), None
patent: 0 999 055 (2000-05-01), None
patent: 2 155 152 (1985-09-01), None
patent: 2 308 460 (1997-06-01), None
patent: WO 98/07069 (1998-02-01), None
patent: WO 99/00655 (1999-01-01), None
patent: WO 99/04361 (1999-01-01), None
patent: WO 99/17093 (1999-04-01), None
patent: WO 99/52633 (1999-10-01), None
patent: WO 00/00678 (2000-01-01), None
patent: WO 00/43748 (2000-07-01), None
patent: WO 00/60345 (2000-10-01), None
patent: WO 01/01025 (2001-01-01), None
patent: WO 01/06529 (2001-01-01), None
patent: WO 01/06575 (2001-01-01), None
patent: WO 01/09595 (2001-02-01), None
patent: WO 01/09595 (2001-02-01), None
patent: WO 02/82047 (2002-10-01), None
“Biochips,” Nature Biotechnology, vol. 18, Supplement 2000, pp. IT43-IT44, 2000.
“Chapter 9: Microfluidic Devices,” Micromachined Transducers Sourcebook, pp. 779-882, 1998.
“Last Chance For Micromachines,” The Economist Technology Quarterly, 8 pages, Dec. 7, 2000.
Ahn, Chong H. et al., “Fluid Micropumps Based On Rotary Magnetic Actuators,” Proceedings of 1995 IEEE Micro Electro Mechanical Systems Workshop (MEMS '95), Amsterdam, Netherlands, pp. 408-412, Jan. 29-Feb. 2, 1995.
Anderson, Janelle R. et al., “Fabrication Of Topologically Complex Three-Dimensional Microfluidic Systems In PDMS By Rapid Prototyping,” Analytical Chemistry, vol. 72, No. 14, pp. 3158-3164, Jul. 15, 2000.
Anderson, Rolfe C. et al., “Microfluidic Biochemical Analysis System,” Transducers '97, 1997 International Conference on Solid-State Sensors and Actuators, Chicago, Illinois, pp. 477-480, Jun. 16-19, 1997.
Angell, James B. et al., “Silicon Micromechanical Devices,” Scientific American, pp. cover, 44-55, Apr. 1983.
Armani, Deniz et al., “Re-Configurable Fluid Circuits By PDMS Elastomer Micromachining,” IEEE Int. Conf. Micro Electro Mech. Syst. Tech. Digest, vol. 12, pp. 222-227, 1999.
Ballantyne, J. P. et al., “Selective Area Metallization By Electron-Beam Controlled Direct Metallic Deposition,” J. Vac. Sci. Technol., vol. 10, No. 6, pp. 1094-1097, Nov. 1973.
Benard, W. L. et al., “A Titanium-Nickel Shape-Memory Alloy Actuated Micropump,” Transducers '97, 1997 International Conference on Solid-State Sensors and Actuators, Chicago, Illinois, pp. 361-364, Jun. 16-19, 1997.
Black, Harvey, “Tiny Technology Promises Tremendous Profits,” The Scientist, vol. 15, No. 21, 4 pages, Oct. 29, 2001.
Bloomstein, T. M. et al., “Laser-Chemical Three-Dimensional Writing For Microelectromechanics And Application To Standard-Cell Microfluidics,” J. Vac. Sci. Technol. B, vol. 10, No. 6, pp. 2671-2674, Nov. 1992.
Bousse, Luc et al., “Electrokinetically Controlled Microfluidic Analysis Systems,” Annu. Rev. Biophys. Biomol. Struc., vol. 29, pp. 155-181, 2000.
Brechtel, R. et al., “Contro
Fluidigm Corporation
Picardat Kevin M.
Townsend and Townsend / and Crew LLP
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