Electrostatic discharge protection of thin-film resonators

Details Electrostatic discharge protection of thin-film resonators Electrostatic discharge protection of thin-film resonators

2006-08-22

2006-08-22

Lebentritt, Michael (Department: 2812)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S570000, C438S582000, C438S613000, C438S637000, C438S640000

Reexamination Certificate

active

07094678

ABSTRACT:
A filter having a thin-film resonator fabricated on a semiconductor substrate and a method of making the same are disclosed. The filter has a bonding pad connected to the resonator and in contact with the substrate to form a Schottky diode with the substrate to protect the resonator from electrostatic discharges.

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