Electrostatic chucks having barrier layer

Details Electrostatic chucks having barrier layer Electrostatic chucks having barrier layer

2008-05-06

2008-05-06

Sherry, Michael (Department: 2836)

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

C361S233000, C428S032710, C428S049000

Reexamination Certificate

active

11102542

ABSTRACT:
An electrostatic chuck for supporting a semiconductor wafer, including: a chuck body having a dielectric region and an insulating region, the insulating region having a higher electrical resistivity than the dielectric region, an electrode embedded in the chuck body, and a barrier layer provided between dielectric region and the insulating region.

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