Electrostatic chucks and electrostatically attracting...

Details Electrostatic chucks and electrostatically attracting... Electrostatic chucks and electrostatically attracting...

2006-05-09

2006-05-09

Sircus, Brian (Department: 2836)

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

C361S233000

Reexamination Certificate

active

07042697

ABSTRACT:
An electrostatic chuck includes a substrate having a wafer-installing face and an opposed back face. An electrostatic chucking electrode is buried in the substrate, and an insulating layer is provided on the back face of the substrate. The substrate also includes a dielectric layer including at least the wafer-installing face and surrounding the electrostatic chucking electrode, and the insulating layer includes an insulating material having a larger volume resistivity than that of the dielectric layer.

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