Photocopying – Projection printing and copying cameras – Detailed holder for original
Reexamination Certificate
2006-09-26
2010-10-12
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
Detailed holder for original
C355S030000, C355S053000, C355S077000, C430S005000, C374S120000, C374S161000, C356S479000
Reexamination Certificate
active
07812929
ABSTRACT:
Disclosed is an electrostatic chuck with a temperature sensing unit, exposure equipment having the electrostatic chuck, and a method of detecting temperature on photomask surfaces. The temperature sensing unit and method of detecting temperature may include obtaining reflectance of a photomask using a multi-wavelength interferometer and determining a temperature on the photomask based on the reflectance.
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Korean Office Action dated Aug. 28, 2006.
Jeon Chan-Uk
Lee Myoung-Soo
Harness & Dickey & Pierce P.L.C.
Kreutzer Colin
Nguyen Hung Henry
Samsung Electronics Co,. Ltd.
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