Electrostatic chuck cleaning method

Details Electrostatic chuck cleaning method Electrostatic chuck cleaning method

2006-02-28

2006-02-28

Stinson, Frankie L. (Department: 1746)

Cleaning and liquid contact with solids

Processes

Hollow work, internal surface treatment

C134S034000

Reexamination Certificate

active

07004180

ABSTRACT:
An electrostatic chuck cleaning process that cleans an electrostatic chuck, equipped in a chamber, for chucking and holding a substrate. This method has (1) a plasma etching process that performs plasma etching on the electrostatic chuck, (2) a substrate mounting process that mounts a substrate on the electrostatic chuck that was subjected to plasma etching in the plasma etching process, and (3) a substrate removal process that removes the substrate that was mounted on the electrostatic chuck in the substrate mounting process.

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