Electrostatic chuck and substrate fixing method using the same

Details Electrostatic chuck and substrate fixing method using the same Electrostatic chuck and substrate fixing method using the same

2008-07-01

2008-07-01

Sherry, Michael J (Department: 2836)

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

C279S128000

Reexamination Certificate

active

07394640

ABSTRACT:
The electrostatic chuck101where pairs of electrodes3a/3b,4a/4band5a/5bto which voltages are applied are embedded in the main body1, and where a substrate110is placed and held on the surface of the main body1, includes a first electrode group constituted of one pair or more of electrodes3a/3barranged in a center region41inside the main body1, and a second electrode group constituted of one pair or more of electrodes4a/4band5a/5barranged in outer peripheral portions42and43surrounding the center region41.

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