Electrostatic chuck and production method therefor

Details Electrostatic chuck and production method therefor Electrostatic chuck and production method therefor

2007-09-04

2007-09-04

Deberadinis, Robert L. (Department: 2836)

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

C219S390000

Reexamination Certificate

active

10814304

ABSTRACT:
The present invention provides an electrostatic chuck comprising a substrate, a dielectric layer formed by thermal spraying on an upper face of the substrate, an internal electrode embedded in the dielectric layer, a feeder terminal portion extending from a lower face of the substrate to the internal electrode, and an electrode provided in the feeder terminal portion, wherein the feeder terminal portion and the substrate are fixed to each other by mechanical joining.

REFERENCES:
patent: 5618350 (1997-04-01), Ishikawa et al.
patent: 5625526 (1997-04-01), Watanabe et al.
patent: 6376808 (2002-04-01), Tachikawa et al.
patent: 6646233 (2003-11-01), Kanno et al.
patent: 6771483 (2004-08-01), Harada et al.
patent: 05-009740 (1993-01-01), None
patent: 05-206030 (1993-08-01), None
patent: 08-218172 (1996-08-01), None
patent: 2002-203660 (2002-07-01), None
patent: 2002-203661 (2002-07-01), None

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