Electrostatic chuck and manufacturing method therefor

Details Electrostatic chuck and manufacturing method therefor Electrostatic chuck and manufacturing method therefor

2005-09-27

2005-09-27

Sircus, Brian (Department: 2836)

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

Reexamination Certificate

active

06950297

ABSTRACT:
An electrostatic chuck of the invention comprising; a first insulating member whose upper surface serves as a mounting surface on which a plate specimen is mounted, a second insulating member which is positioned facing a lower surface side of the first insulating member, and an internal electrode located between the first insulating member and the second insulating member, wherein the first insulating member is a composite ceramic having as its main constituents 1 wt % to 4 wt % of silicon carbide, and aluminum oxide, with a volume resistivity value in a temperature range of −200° C. to 200° C., of 1×1014Ωcm to 1×1016Ωcm.

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Sugino Machine LimitedCatalogue, Copyright© 2001-2004, pages displayingWet Type Atomization Unitof a Ulthimaizer System andUlthimaizer System.

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