Electrostatic chuck and its manufacturing method

Details Electrostatic chuck and its manufacturing method Electrostatic chuck and its manufacturing method

2007-10-16

2007-10-16

Sherry, Michael (Department: 2836)

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

C361S230000

Reexamination Certificate

active

10481425

ABSTRACT:
An electrode pattern of an electrostatic chuck includes linear portions in a radial direction and a plurality of concentric C-shaped portions branching out from the linear portions. The linear portions are disposed opposite to each other in a diametrical direction and are such that they lie on a line that is almost straight. The C-shaped portions are engaged alternately like teeth of a comb.

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