Electrostatic chuck

Details Electrostatic chuck Electrostatic chuck

2007-10-09

2007-10-09

Leja, Ronald W. (Department: 2836)

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

Reexamination Certificate

active

11052229

ABSTRACT:
An electrostatic chuck is provided in which a lower oxide coating, an electrode, and an upper oxide coating are formed on a substrate. The lower oxide coating is formed by spraying an oxide of Gd, Tb, Dy, Ho, Er, Tm, Yb or Lu and has a dielectric strength of 15-50 kV/mm.

REFERENCES:
patent: 6051303 (2000-04-01), Katsuda et al.
patent: 6139983 (2000-10-01), Ohashi et al.
patent: 6284323 (2001-09-01), Maloney
patent: 6448538 (2002-09-01), Miyata
patent: 6576354 (2003-06-01), Tsukatani et al.
patent: 6632549 (2003-10-01), Ohashi et al.
patent: 6733843 (2004-05-01), Tsukatani et al.
patent: 6749930 (2004-06-01), Ohashi
patent: 7122490 (2006-10-01), Kobayashi et al.
patent: 2002/0037430 (2002-03-01), Takeishi et al.
patent: 2002/0160189 (2002-10-01), Wataya et al.
patent: 2002/0177014 (2002-11-01), Kaneyoshi et al.
patent: 2002/0192429 (2002-12-01), Takai et al.
patent: 2004/0013911 (2004-01-01), Maeda
patent: 1 156 130 (2001-11-01), None
patent: 362298119 (1987-12-01), None
patent: 11-279302 (1999-10-01), None
patent: 2001-164354 (2001-01-01), None
patent: 2001-226773 (2001-08-01), None
patent: 2002-289329 (2002-10-01), None

Affiliated with

Also associated with

Rating

Electrostatic chuck does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electrostatic chuck, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electrostatic chuck will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3874606