Electrostatic capacitance type transducer and method for produci

Details Electrostatic capacitance type transducer and method for produci Electrostatic capacitance type transducer and method for produci

1997-09-03

1999-06-29

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

73718, 73724, 361283, 361284, G01L 114

Patent

active

059172649

ABSTRACT:
The present invention provides an electrostatic capacitance type transducer and a method for producing the same, with the ensured sufficient connecting strength and insulation between a movable electrode and a fixed electrode and smooth production. In the electrostatic capacitance type transducer having: a substrate; a movable electrode placed on the opposite side of a space from the substrate and having displacement in relation to the substrate; and a fixed electrode formed on a detecting face of the substrate which is opposite to the movable electrode, an insulation film is formed on the approximately whole surface, including the fixed electrode, of the detecting face of the substrate, in which the substrate and the movable electrode are connected through the insulation film to each other by means of the anode-contact.

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