Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate
2005-07-26
2005-07-26
Jackson, Stephen W. (Department: 2836)
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
C361S233000
Reexamination Certificate
active
06922325
ABSTRACT:
Electrostatic attraction is performed on a plate-shaped object9in that an attraction power source3applies a voltage to a pair of attraction terminals23, 24mounted inside a dielectric block22, the surface of which is an attraction surface, thereby inducing static electricity in an attraction surface. The attraction power source3adjusts the surface potential of a plate-shaped object9by independently controlling voltages applied to the respective attraction terminals23, 24. Processing is carried out on the surface of the plate-shaped object9while the injection of charged particles into the plate-shaped object9is suppressed. A control part6which controls the attraction power source3records, in a recording part62, data obtained by measuring in advance the surface potential of the plate-shaped object9while respectively changing the voltage applied to the attraction terminals23, 24, and controls the attraction power source3with a pattern selected in accordance with this data.
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Electrostatic Clamping Applied to Semiconductor Plasma Processing,J. Electrochem. Soc., vol. 140, No. 11, Nov. 1993, The Electrochemical Society, Inc., pp. 3245-3255.
Anelva Corporation
Jackson Stephen W.
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