Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate
2011-08-09
2011-08-09
Jackson, Stephen W (Department: 2836)
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
C228S044700, C228S102000, C228S212000
Reexamination Certificate
active
07995324
ABSTRACT:
An object is providing an electrostatic attraction apparatus and an attracting/releasing method capable of reliably attracting and quickly releasing a glass substrate. An attraction force for attracting a glass substrate is obtained according to the physical properties of the glass substrate. In addition to obtaining an attraction voltage (Vc(t)) required for obtaining the attraction force, a holding voltage (Vh(t)) for holding an attraction state and a release voltage (Vr(t)) for releasing the glass substrate are also obtained (S1to S7). Attraction time period (tc) is actually measured and if this measured time is different from a preset attraction time (t1), the holding voltage (Vh(t)) and the release voltage (Vr(t)) are recalculated according to the actually measured attraction time period (tc) (S8to S11).
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Aoi Tatsufumi
Horie Shigenari
Kato Mitsuo
Kawano Masaki
Kobayashi Toshiro
Jackson Stephen W
Mai Tien
Mitsubishi Heavy Industries Ltd.
Wenderoth , Lind & Ponack, L.L.P.
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