Electrostatic adsorbing apparatus having electrostatic adsorbing

Details Electrostatic adsorbing apparatus having electrostatic adsorbing Electrostatic adsorbing apparatus having electrostatic adsorbing

1989-05-25

1990-12-04

Pellinen, A. D.

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

361234, H02N 1300

Patent

active

049758020

ABSTRACT:
An electrostatic adsorbing apparatus includes an electrostatic adsorbing plate for adsorbing and laminating a plurality of objects. The adsorbing apparatus has a set of electrodes and the electrostatic adsorbing plate adsorbs and holds sheet-shaped objects by an electrostatic adsorbing force induced by the set of electrodes. The electrodes are arranged like a comb in the electrostatic adsorbing plate, and a plurality of adsorbing portions which extend in the horizontal direction are formed on the surface of the electrostatic adsorbing plate so as to adsorb and laminate a plurality of the sheet-shaped objects such that upper end portions of the objects are slightly vertically offset from each other.

REFERENCES:
patent: 3582730 (1971-06-01), Teston
patent: 3634740 (1972-01-01), Stevko
patent: 3892614 (1975-07-01), Levy
patent: 3916270 (1975-10-01), Wachtler et al.
patent: 4667110 (1987-05-01), Kariya
patent: 4751609 (1988-06-01), Kasahara
patent: 4766515 (1988-08-01), Bollen et al.
IBM Technical Disclosure Bulletin, vol. 21, No. 11, Apr. 1979, "Electrostatic Holding Fixture for Flatness of a Nonrigid Sheet in Vacuum".

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