Electrostatic actuator with spatially alternating voltage patter

Details Electrostatic actuator with spatially alternating voltage patter Electrostatic actuator with spatially alternating voltage patter

1997-03-14

1999-11-16

Ramirez, Nestor

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

318116, H02N 100

Patent

active

059863811

ABSTRACT:
An electrostatic actuator having a first member and a second member. The first member has a first opposed surface that includes an array of driven electrodes. The driven electrodes have a pitch p.sub.r. The second member has a second opposed surface and includes an array of drive electrodes. A support positions the first member adjacent the second member with the first opposed surface spaced apart from the second opposed surface by a spacing d. The ratio of the spacing and the pitch should be less than eight, and is preferably less than 2.25. The support permits the first member to move relative to the second member, or vice versa. A voltage source establishes a substantially alternating voltage pattern on the array of driven electrodes. An electrode control establishes a substantially alternating voltage pattern on the array of drive electrodes, and selectively imposes a local disruption on the substantially alternating voltage pattern on the array of drive electrodes to move the movable one of the first member and the second member relative to the other.

REFERENCES:
patent: 4754185 (1988-06-01), Gabriel et al.
patent: 5378954 (1995-01-01), Higuchi et al.
patent: 5534740 (1996-07-01), Higuchi et al.
Niino, Toshiki et al., "Dual Excitation Multiphose Electrostatic Drive", IEEE, 1995, pp. 1318-1325.
Niino, Toshiki, et al. "Electrostatic Artificial Muscle: Compact, High-Power Linear Actuators with Multiple-Layer Structures", IEEE, 1994, pp. 130-135.
Niino, Toshiki, et al., "High-Power and High-Efficiency Electrostatic Actuator", IEEE, 1993, pp. 236-241.
Niino, Toshiki et al., "Development of an Electrostatic Actuator Exceeding 10N Propulsive Force", IEEE, 1992, pp. 122-125.
Trimmer W. S. N et al., "Design Considerations for a Practical Electrostatic Micro-Motor", Sensors and Actuators, 11, 1987, pp. 189-206.

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