Electrostatic actuator with interdigitated electrode structure

Details Electrostatic actuator with interdigitated electrode structure Electrostatic actuator with interdigitated electrode structure

2007-12-26

2010-02-09

Mullins, Burton (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

C359S200600

Reexamination Certificate

active

07659652

ABSTRACT:
There is provided an electrostatic actuator with the interdigitated electrode structure comprising a movable rod11disposed in parallel with an alignment axis line Ox predetermined on a substrate; a movable interdigitated electrode12fixed on the both sides of a coupling point11C on the movable rod11and having a plurality of movable electrode fingers12b; fixed interdigitated electrodes21, 22fixed to the substrate and having a plurality of fixed electrode fingers21b,22b; and four hinges23, 24whose one ends are anchored respectively to the movable rod and the other ends are anchored to anchoring points32A-32D of the substrate. Lengths of those hinges are longer than distances from anchoring points to the alignment axis line and a displacement Lc of a coupling point11C in a direction orthogonal to the alignment axis line is reduced to be smaller than a distance between the respective movable electrode fingers and the closest fixed electrode finger.

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Legtenberg, R., et al., “Comb-drive actuators for large displacements,” J. Micromech, Microeng. 6, 1996, pp. 320-329.

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