Electrostatic actuator, probe using the actuator, scanning probe

Details Electrostatic actuator, probe using the actuator, scanning probe Electrostatic actuator, probe using the actuator, scanning probe

1997-01-16

1998-05-19

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

25044211, 310304, 369126, H01J 3720

Patent

active

057539111

ABSTRACT:
An electrostatic actuator includes a movable plate arranged on a substrate through a gap, a movable electrode arranged on the movable plate, and a fixed electrode arranged on the substrate to oppose the movable electrode. The movable electrode and the fixed electrode are arranged not to overlap at any portion in a direction perpendicular to a surface of the fixed electrode. The movable electrode and the fixed electrode have comb-like shapes.

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Binnig et al. "Scanning Tunneling Microscopy", Helv. Phys. Acta, vol. 55, pp. 726-735, 1982.
Peterson, IBM J. Res. Dev., vol. 24, No. 5, pp. 631-637, Sep. 1980.
Cheung, "Modeling and Position-Detection of a Polysilicon Linear Microactuator" DSC-vol. 32, Micromechanical Sensors, Actuators, and Systems ASME 1991, pp. 269-278.

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