Electrostatic actuator

Details Electrostatic actuator Electrostatic actuator

2008-05-15

2009-08-25

Mullins, Burton (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

C318S116000

Reexamination Certificate

active

07579747

ABSTRACT:
An electrostatic actuator includes a stator having a plurality of protruding electrodes formed on a surface of a base material, where the surface serves as a counter surface, and a mover disposed so as to face the stator, where the mover has a plurality of protruding electrodes formed on a surface of a base material and the surface serves as a counter surface. A side surface of each of the protruding electrodes of the stator faces a side surface of a corresponding one of the protruding electrodes of the mover. Planar electrodes are formed on at least one of the counter surface of the stator and the counter surface of the mover in a portion other than a portion where the protruding electrodes are formed, and the planar electrodes face end surfaces of the protruding electrodes formed on the other counter surface.

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International Search Report dated Jan. 23, 2007 from International Application No. PCT/JP2006/322806.

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