Electrostatic actuator

Details Electrostatic actuator Electrostatic actuator

1993-06-02

1995-09-05

Skudy, R.

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

310 12, 310 40MM, H02N 100

Patent

active

054481244

ABSTRACT:
An electrostatic actuator according to the present invention includes a first member having a plurality of striped electrodes insulated from one another and arranged in a prescribed direction with a prescribed spacing between them, a second member having a plurality of striped electrodes insulated from one another and arranged in a prescribed direction with a prescribed spacing between them, and continuous-waveform polyphase AC power supplies applied to the electrodes of the first member and the electrodes of the second member, one or both of the first member and second member being moved by an electrostatic coulomb force between the first member and the second member.

REFERENCES:
patent: 3433981 (1969-03-01), Bollee
patent: 4814657 (1989-03-01), Yano et al.
patent: 5001381 (1991-03-01), Watanabe
Proc. 1991 Workshop on Micro Electro Mechanical Systems, Jan. 1991, pp. 9-14.
Proc 1992 IEEE Workshop on Micro Electro Mechanical Systems, Feb. 1992 pp. 122-127.
Proc. 1993 IEEE Workshop on Micro Electro Mechanical Systems, Niino et al. pp. 236-241.
Proc IEEE, Workshop on Micro Electro Mechanical Systems, Egawa et al. Feb. 11-14 1990, pp. 24-29.
Niino et al, "Development of an Electrostatic Actuator . . . ", Proceedings of the Workshop on Micro Electro Mechanical Systems: Travemunde 1992: New York, IEEE, 1992; pp 122-127.
Test Manufacture of an Electrostatic Film Actuator Having Electrodes on the Stator and Slider, by Higuchi et al, pp. 202-203, (no month) 1991, Japan.

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