Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Involving measuring – analyzing – or testing
Reexamination Certificate
2005-09-28
2010-11-23
Wilkins, III, Harry D (Department: 1795)
Electrolysis: processes, compositions used therein, and methods
Electrolytic coating
Involving measuring, analyzing, or testing
C204S194000
Reexamination Certificate
active
07837850
ABSTRACT:
An electroplating system is provided. The system comprises a reaction tank, a tube, and a video bubble detector. The reaction tank, having a first diameter, contains a plating solution. The tube, connecting to the reaction tank, comprises an inflow tube and a branch, wherein the inflow tube inputs the plating solution into the reaction tank, and the branch has an enlarged part having the first diameter. The video bubble detector, mounted on the enlarged part of the branch, detects the presence of a bubble in the plating solution flowing through the branch.
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Chen Hung-Cheng
Chern Chyi-Shyuan
Guo Ming-Da
Hu Pin-Chieh
Lin Kuan-Hsiao
Ripa Bryan D.
Taiwan Semiconductor Manufacturing Co. Ltd.
Thomas Kayden Horstemeyer & Risley
Wilkins, III Harry D
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