Pumps – Condition responsive control of pump drive motor – With condition responsive control of pump fluid valve
Patent
1995-08-21
2000-02-08
Kim, Ted
Pumps
Condition responsive control of pump drive motor
With condition responsive control of pump fluid valve
417 442, 417 443, 4174234, 62 555, F04B 4900
Patent
active
06022195&
ABSTRACT:
A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
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Eacobacci Michael J.
Fortier Gerald J.
Gaudet Peter W.
Lepofsky Robert J.
Matte Stephen R.
Helix Technology Corporation
Kim Ted
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