Pumps – Condition responsive control of pump drive motor – By control of electric or magnetic drive motor
Reexamination Certificate
2005-04-27
2008-08-19
Freay, Charles G (Department: 3746)
Pumps
Condition responsive control of pump drive motor
By control of electric or magnetic drive motor
C417S053000, C417S423400, C417S901000, C062S055500
Reexamination Certificate
active
07413411
ABSTRACT:
A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
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Fortier Gerald J.
Gaudet Peter W.
Lepofsky Robert J.
Matte Stephen R.
Rosner Steven C.
Brooks Automation Inc.
Freay Charles G
Hamilton Brook Smith & Reynolds P.C.
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