Electronic probe and method for its manufacture

Details Electronic probe and method for its manufacture Electronic probe and method for its manufacture

1992-07-01

1993-12-14

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

H01J 3726

Patent

active

052705439

ABSTRACT:
The present invention relates to an electronic probe. According to the invention this comprises a diamond substrate which is provided with an electrically conductive monocrystalline diamond layer, deposited via vapour deposition, which is ground to a tip of the probe. The invention entails further a method for the manufacture of such an electronic probe.

REFERENCES:
patent: 4943720 (1990-07-01), Jones
patent: 5010249 (1991-04-01), Nishikawa

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