Electronic microscope apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C250S305000, C250S306000, C250S307000, C250S310000, C250S397000, C250S398000

Reexamination Certificate

active

07872232

ABSTRACT:
To enable measurement of an elastically scattered electron image, a characteristic-X-ray-based element image and an electron-beam-energy-spectroscopy-based element image with a high S/N and high spatial resolution in an electronic microscope having a function to produce an element image. Measurement of a characteristic X-ray signal and electron beam energy loss spectra or measurement of a plurality of energy filter signals including a core loss of an observed element is performed simultaneously and continuously with detection of elastically scattered electrons transmitted through a specimen to be analyzed, and element images based on characteristic X-rays and electron beam energy spectroscopy are added up while correcting a positional misalignment with respect to elastically scattered electron images continuously observed (see FIG.1).

REFERENCES:
patent: 6703613 (2004-03-01), Kaji et al.
patent: 6794648 (2004-09-01), Kaji et al.
patent: 7067805 (2006-06-01), Kajl et al.
patent: 7250601 (2007-07-01), Kaji et al.
patent: 2006/0011836 (2006-01-01), Kaji et al.
patent: 2002-056798 (2002-02-01), None
patent: WO 00/41206 (2000-07-01), None
patent: WO 03/038418 (2003-05-01), None

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Electronic microscope apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electronic microscope apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electronic microscope apparatus will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2634511

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.