Electronic microscope apparatus

Details Electronic microscope apparatus Electronic microscope apparatus

2011-01-18

2011-01-18

Berman, Jack I (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S305000, C250S306000, C250S307000, C250S310000, C250S397000, C250S398000

Reexamination Certificate

active

07872232

ABSTRACT:
To enable measurement of an elastically scattered electron image, a characteristic-X-ray-based element image and an electron-beam-energy-spectroscopy-based element image with a high S/N and high spatial resolution in an electronic microscope having a function to produce an element image. Measurement of a characteristic X-ray signal and electron beam energy loss spectra or measurement of a plurality of energy filter signals including a core loss of an observed element is performed simultaneously and continuously with detection of elastically scattered electrons transmitted through a specimen to be analyzed, and element images based on characteristic X-rays and electron beam energy spectroscopy are added up while correcting a positional misalignment with respect to elastically scattered electron images continuously observed (see FIG.1).

REFERENCES:
patent: 6703613 (2004-03-01), Kaji et al.
patent: 6794648 (2004-09-01), Kaji et al.
patent: 7067805 (2006-06-01), Kajl et al.
patent: 7250601 (2007-07-01), Kaji et al.
patent: 2006/0011836 (2006-01-01), Kaji et al.
patent: 2002-056798 (2002-02-01), None
patent: WO 00/41206 (2000-07-01), None
patent: WO 03/038418 (2003-05-01), None

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