Electricity: electrothermally or thermally actuated switches – Electrothermally actuated switches – Fusible element actuated
Reexamination Certificate
2008-05-28
2009-06-09
Vortman, Anatoly (Department: 2835)
Electricity: electrothermally or thermally actuated switches
Electrothermally actuated switches
Fusible element actuated
C337S187000, C337S295000, C257S529000
Reexamination Certificate
active
07545253
ABSTRACT:
An electronic fuse for an integrated circuit and a method of fabrication thereof are presented. The electronic fuse has a first terminal portion and a second terminal portion interconnected by a fuse element. The fuse element has a convex upper surface and a lower surface with a radius of curvature at a smallest surface area of curvature less than or equal to 100 nanometers. Fabricating the electronic fuse includes forming an at least partially freestanding dielectric spacer above a supporting structure, and then conformably forming the fuse element of the fuse over at least a portion of the freestanding dielectric spacer, with the fuse element characterized as noted above. The dielectric spacer may remain in place as a thermally insulating layer underneath the fuse element, or may be removed to form a void underneath the fuse element.
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Hsu Louis Lu-Chen
Mandelman Jack A.
Tonti William R.
Yang Chih-Chao
Heslin Rothenberg Farley & Mesiti PC
International Business Machines - Corporation
Vortman Anatoly
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