Electronic devices

Details Electronic devices Electronic devices

1990-01-12

1992-09-15

Dang, Thi

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156657, 1566591, 1566611, 156647, 313309, 445 35, 445 46, 445 58, H01J 130

Patent

active

051475014

ABSTRACT:
In the production of micron-size pyramid emitters for field emission devices, a first layer of electrically-conductive material, such as single crystal silicon or metal, is etched to form column-like structures each of which tapers from each end of the column towards an intermediate portion along its length. A second conductive layer is formed in contact with the free ends of the columns, and etching of the columns is then resumed until the intermediate portion of each column is etched through, leaving a pair of pyramid emitters pointing towards one another and supported by the respective conductive layer.

REFERENCES:
patent: 3789471 (1974-02-01), Spindt et al.
patent: 4522682 (1985-06-01), Soclof
patent: 4973378 (1990-11-01), Lee et al.
patent: 4983878 (1991-01-01), Lee et al.

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