Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate
2007-01-16
2007-01-16
Duda, Kathleen (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
C430S330000, C430S314000, C438S626000
Reexamination Certificate
active
10394342
ABSTRACT:
Disclosed are methods of manufacturing electronic devices, particularly integrated circuits. Such methods include the use of low dielectric constant material prepared by using a removable porogen material.
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Gallagher Michael K.
You Yujian
Cairns S. Matthew
Duda Kathleen
Phan Nhat
Shipley Company L.L.C.
Walters Todd R.
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