Electron storage source for electron beam testers

Details Electron storage source for electron beam testers Electron storage source for electron beam testers

1988-09-30

1989-08-29

Fields, Carolyn E.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250305, 250306, 250423R, 250396R, H01T 3700

Patent

active

048619914

ABSTRACT:
An electron beam tester (11) utilizes a source (13) of stored electrons to produce a probing beam (14) of short pulses and high intensity. The high intensity improves the signal-to-noise ratio of the potential being measured and is especially suited for measuring potentials in high speed integrated circuits (19) while they are operating. The cyclotron principle is adapted for storing the electrons in an orbital configuration wherein the electrons are clustered in bunches having substantially the same energy level. These characteristics of the electrons in a beam facilitate its operation and control in an electron beam tester for contactless monitoring of voltage potentials in an operating high speed integrated circuit.

REFERENCES:
patent: 2531384 (1950-11-01), Bailey
patent: 3398308 (1968-08-01), Steimel
patent: 3879679 (1975-04-01), Mourier
patent: 4193003 (1980-03-01), Blanchard et al.
patent: 4639634 (1989-01-01), Meyrand
patent: 4740973 (1988-04-01), Madey et al.

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