Electron scanning apparatus

Details Electron scanning apparatus Electron scanning apparatus

1974-12-12

1976-03-02

Lawrence, James W.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250311, G01N 2300, G21K 700, H01K 3726

Patent

active

039420051

ABSTRACT:
An electron scanning apparatus is capable of two-dimensional scanning of a specimen with a primary electron beam and also capable of radiating the primary electron beam in spot on the specimen. While moving the specimen in a straight line, the two-dimensional scanning with the primary electron beam is selectively alternated with the spot radiation with the primary electron beam, thus making it possible to identify the point of analysis on the specimen in the course of linear analysis of the specimen.

REFERENCES:
patent: 2354263 (1944-07-01), Hillier
patent: 3786271 (1974-01-01), Joy et al.
patent: 3878392 (1975-04-01), Yew et al.

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