Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1989-07-27
1991-01-29
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250306, 250397, 378 45, 378 46, 378 53, 378 88, G01N 2304
Patent
active
049888722
ABSTRACT:
An electron probe microanalyzer equipped with a wavelength-dispersive x-ray spectrometer and also with an energy-dispersive x-ray spectrometer. X-rays emanating from the same sample region are detected by these two spectrometers, and spectra are created from the detected x-rays. Cursors which can be moved at will are superimposed on the spectra. One of the cursors is moved in relation to the other. That is, when one cursor is moved into the position of a desired wavelength or energy, the other is moved into the position of the corresponding energy or wavelength. The use of the cursors enables one to precisely and easily find the existence of a certain element in the sample region from the spectra obtained by the two x-ray spectrometers.
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Kawabe Kazuyasu
Nagatsuka Yoshitaka
Ohtsuki Masayuki
Saito Masaki
Yoshida Koji
Berman Jack I.
Jeol Ltd.
Nguyen Kiet T.
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