Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1996-07-19
1997-08-12
Nguyen, Kiet T.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
H01J 37256
Patent
active
056568126
ABSTRACT:
An electron probe microanalyzer is capable of easily carrying out a precise x-ray analysis of a specimen whose surface is not flat or smooth, by satisfying the focusing conditions. A region to be analyzed on the specimen surface is divided into a given number of subregions by division lines. The heights, or z-coordinates, of the intersections of the division lines are measured. The z-coordinates are stored in a memory, together with their x- and y-coordinates. A unit plane approximating each subregion is determined from the x-, y-, and z-coordinates of the intersections. A plurality of analysis points are established in each determined unit plane. The heights of the analysis points are calculated, using a mathematical formula which defines the positions of the analysis points and the unit planes. In making an x-ray analysis of each analysis point, heights of the specimen are determined from the calculated z-coordinates.
REFERENCES:
patent: 5001344 (1991-03-01), Kato et al.
patent: 5128545 (1992-07-01), Komi
Japanese Published Patent Application No. 59-151739 entitled "Sample Movement in X-Ray Microanalyzer", Yoshitaka Nagatsuka, published Aug. 30, 1984.
Jeol Ltd.
Nguyen Kiet T.
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