Electron probe microanalyzer

Details Electron probe microanalyzer Electron probe microanalyzer

1998-01-22

2000-09-12

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250307, 250397, H01J 3721

Patent

active

061181234

ABSTRACT:
There is disclosed an electron probe microanalyzer capable of achieving focusing after movement of a specimen in a shorter time than conventional, thus improving the total measuring efficiency. When movement into a specified analysis point on the specimen is completed, an automatic focusing device automatically performs a focusing operation consisting of scanning a relatively narrow range. If this operation is performed unsuccessfully, the automatic focusing device automatically performs a second focusing operation consisting of scanning a wider range. Thus, the instrument searches for a focal point.

REFERENCES:
patent: 3629579 (1971-12-01), Naltou
patent: 4440475 (1984-04-01), Colliaux
patent: 5128545 (1992-07-01), Komi
patent: 5192866 (1993-03-01), Komi
patent: 5199057 (1993-03-01), Tamura et al.
patent: 5656812 (1997-08-01), Takashi
"Development of a High-Speed Optical Microscope Auto-Focus Control System for EPMA", S. Notoya et al., Proceedings Microscopy and Microanalysis 1996, Aug. 11-15, 1996 (pp. 442-443).

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